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http://repositoriodigital.ipn.mx/handle/123456789/9069
Título : | Low Temperature Operation of a Microbolometer Array for Terahertz Detection |
Autor : | Rojas López, Marlon |
Palabras clave : | Microbolometer |
Fecha de publicación : | 17-dic-2012 |
Resumen : | In this work we present the design and characterization of a microbolometer array for detection of radiation in the 0.7-1.5 THz frequency range. Our study shows that the microbolometer array can operate from 77 to 350 K. The sensing film is made of a boron-doped hydrogenated amorphous silicon film, which was deposited on a cavity-suspended silicon nitride membrane forming a 5x5 array. We obtained a higher temperature coefficient of resistance (TCR) than those values reported in the literature. The current–voltage characteristics present an ohmic behaviour. |
Descripción : | Article |
URI : | http://www.repositoriodigital.ipn.mx/handle/123456789/9069 |
Aparece en las colecciones: | Artículos |
Ficheros en este ítem:
Fichero | Descripción | Tamaño | Formato | |
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Pages_2010_WOLTE9_ProceedingsCD.pdf | 230.96 kB | Adobe PDF | Visualizar/Abrir |
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