Structural Properties of HfO2 films deposited by spray pyrolysis technique

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Título :	Structural Properties of HfO2 films deposited by spray pyrolysis technique
Palabras clave :	oxido de hafnio
Fecha de publicación :	16-ene-2013
Editorial :	Instituto Politecnico Nacional
Descripción :	Structural, morphology and composition properties of Hafnium Oxide (HfO2) films are reported. The films were prepared by spray pyrolysis deposition process, using chlorides as raw materials in deionised water as solvent. Corning glass was used as substrates at temperatures from 350°C to 600°C. X ray analysis shows an amorphous structure at low temperatures, while substrate temperatures higher than 400°C monoclinic phase of HfO2 appear. This result is confirmed by TEM. Scanning electron microscopy was use to observe the microstructure of the films; rough surface with spherical particles are appreciated. The chemical composition was obtain by Energy Dispersive Spectroscopy (EDS), a rate Hf / O close to ideal (0.5) was obtained. Articulo en extenso de memoria de simposio Instituto Politecnico Nacional. CONACYT
URI :	http://www.repositoriodigital.ipn.mx/handle/123456789/11159
Otros identificadores :	978-607-41-022-4 http://hdl.handle.net/123456789/674
Aparece en las colecciones:	Doctorado

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